微機(jī)械氣流式水平姿態(tài)傳感器的研究.pdf

1、北京信息科技大學(xué)碩士學(xué)位論文微機(jī)械氣流式水平姿態(tài)傳感器的研究姓名：劉玉潔申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：樸林華20081201ABSTRACTABSTRACTThemicromachinedairflowlevelposturesensorwhichisdevelopedbyusingthependulumcharacteristicoffreeconvectiongaswithinclosedcavityBeca

2、useofthegassensitiveelement，ithasthecharacteristicofbearingthehighoverload，shortresponsetimeThiskindofsensors，whichcaninspectobliquityandacceleration，Canbeusedinmanydomains，suchascars，robots，helmets，communications，consum

3、edelectron，andtoysetcInthispaperthestructureofmicromachinedairflowtiltanglesenseorganiscomputedwithfiniteelementmethod，usingthesoftwareofANSYSFLOTRANCFD，andthethreedimensionalfiniteelementmodelofsenseorganisbuiltWithfini

4、teelementmethod，thetemperaturefieldandflowfieldwithinsenseorganarecomputedrespectivelyindifferentinclinestatesThen，designthesignalprocessingcircuitoflevelposturesensorThecircuitconsistsofpre‘signalprocessingcircuitanddig

5、italcompensationcircuitBasedonthedesignofsignalprocessingcircuit，thesensorobtainscorrecttiltangleoutputusingsinglechipwithMSC1214technique，thesoftwarecompensationofthesensorisfinishedonthebasisoftherelationofoutputvoltag

6、eandtiltangleandthechangeofenvironmenttemperatureThe’compensmionconsistsofsensitivity—temperaturecompensation，zerotemperaturecompensationandlinearitycompensationAfterthecompensation，thesensitivitvtemperaturecoefficientde

7、clinesfrom23mV／o／℃tO502mY／o／℃，andtheoperatingtemperatureexpandsfromroomtemperatureto30℃30℃Duringthetemperaturerange，zerovoltagechangedeclinesfrom50206VtoS0O1Vandafterthelinearitycompensation，sensor’Snonlinearitydeclinesf