高頻軟磁薄膜電感的研究.pdf

1、蘭州大學碩士學位論文高頻軟磁薄膜電感的研究姓名：李喜玲申請學位級別：碩士專業(yè)：凝聚態(tài)物理指導教師：薛德勝20090601AbstractThinfilminductorsareimportantcomponentsinmonolithicradiofrequency(RDcircuits，suchasvoltage—controlledoscillatorsCoco)，lownoiseamplifiersandpassive—eleme

2、ntfiltersItwasimportantabouttheresearchesofmaterial，designofinductorsandmanufactureofdevicesInordertoincreaseinductance，operatingfrequencyandqualityfactorbutreducecapacitorloss，thethinfilminductorwaspreparedusinghi曲perme

3、abilitymaterialforconductorStaticanddynamicmagnetismsofthemagneticthinfilmwereinvestigatedAndwealsostudiedthellighfrequencyperformanceofinductorsThemainworkswereasfollow：1Thechoiceandperformanceresearchofinductormaterial

4、TheC092Zr8thinfilmofhighpermeabilitywasinvestigatedsystematicallyThroughchangingprocess，itwasshownthatC092Zr8thinfilmhadwellinplaneuniaxialanisotropyThecoerciveforceofeasyaxisandhardaxiswerebothlowerthan0203kA／mTheanisot

5、ropyfield風was24kA／mThesaturationmagnetization肋尥Was12TTherelativeinitialpermeabilityofC092Zr8couldreach4002ThedesignandpreparationofthinfilminductorsFirstlyUinductorswereresearchedtheoreticallyThen，themillimetrictheoretic

6、alinductorswerepreparedLast，microninductorsweredesignedandpreparedTheCuandC092Zr8inductorswerepreparedbyradiofrequency(r0sputteringontolOxlOxO42mm)Si02JSisubstratesTheparametersofthetwoinductorswerethesamewiththelinewidt

7、hw=150mm，spaced=275nllaandthicknesst=200nna3TheperformanceofhighpermeabilitythinfilminductorsFromtheresults，itWasshownthattheinductanceoftheC092ZrsinductorwaslargerthanthatofCuinductorwhenfrequencyfrom1MHzto110MHzAndat60

8、MHz，theinductanceoftheC092Zr8inductorwas50IxH，whichwasenhancedbyfivetimesfrom10pHoftheCuinductorThecapacitanceandqualityfactoroftheCuinductorswerealittlebitlargerthanthatoftheC092Zr8inductorItWasshownthattheinductorperfo