微流控芯片上相變閥的研究.pdf

1、大連理工大學(xué)碩士學(xué)位論文微流控芯片上相變閥的研究姓名：于曉宇申請學(xué)位級別：碩士專業(yè)：微機(jī)電工程指導(dǎo)教師：杜立群徐征20091216StudyonthePhaseChangingValveinMicrofluidicChipAbstractMicroTotalAnalysisSystem(肛一TAS)consumption，convenientusingandSOonhasmanyadvantages，suchashighintegrat

2、ion，lowIthasarousedawiderangeofapplicationsMicronuidshouldbecontrolledeffectivelyinItTASwhenitisunderworkingstatewhichshouldbe似61ledbvvalvesAndthevalvesshouldbeefficientandreliableThephasechanging(PC)valvecanbeusedtocont

3、rolthedosing／openingofmicrochannelbyfreezing／meltingthelocalfluidItissuitablefor“TASTherefore，thePCvalvehasattractedwidelyattentionThemamematicalmodelofthePCvalveWasestablished；thenumericalsimulationofthePCvalveWasperfor

4、med；themicrofluidicchipwhichintegratedthePCvalveWasfabricated；theoperatingcharacteristicsofthePCvalveweretestedTheresearchobjectistheincompressibleNewtonianfluidinelectroosmoticorpressuredrivenThemicrofuidmovementWasdesc

5、ribedbyN—SequationandcontinuityequationthemicrofluidenergytransmissionandthegenerationsofthephasechangeweredescribedbyheatconductionequationandphasechangeequationThenumericalsimulationofthePCvalveintheelectroosmoticandpr

6、essuredrivenwereperformedrespectivelyComparingtothecoolingpowerdensityinpressuredriven，thecoolingpowerdensityinelectroosmoticdrivenwhichma：kest11emicrod1annelcloseismuchbiggerinthesamedrivenflowThereasonisthatjouleheatis

7、inducedinelectroosmoticdrivenAccordingtothechipsrequirementsoftestexperimentsandthecharacteristicsofthedifferentchipmaterialsinthefabricationprocess，Polydimethylsiloxane(PDMS)GlassPolymethylMethacrylate(PMMA)microfluidic

8、chipandPMMA—PMMAmicrofluidicchiphadbeendesignedandfabricatedinthepaperThestructureandfabricationprocessofthesetwochipswereintroducedThesemiconductorcoolingdevicedrivenequipmentofPCvalveiscommercialTestplatformsinelectroo

9、smoticandpressuredrivenweresetteduprespectively，accordingtothegradientofconductivityfromliquidstatetosolidstate，thetimeofclosingthechannelbythePCvalvewastestedThelessthedrivenvoltageorpressurewere，themorethecoolingpowerd