納米三坐標(biāo)測(cè)量機(jī)機(jī)械結(jié)構(gòu)及接觸式測(cè)頭技術(shù)研究.pdf

1、合肥工業(yè)大學(xué)博士學(xué)位論文納米三坐標(biāo)測(cè)量機(jī)機(jī)械結(jié)構(gòu)及接觸式測(cè)頭技術(shù)研究姓名：王偉麗申請(qǐng)學(xué)位級(jí)別：博士專業(yè)：精密儀器及機(jī)械指導(dǎo)教師：范光照20080901ABSTRACTWiththedevelopmentofultraprecisionmachiningtechnology3Dmeasuringmachineswithhighresolution眥neededtomeettheminiaturecomponentsCoordinateMe

2、asuringMachines(CMMs)麗msmallsizeandmicro／nanometerresolutionaredevelopedviabreakingthroughthebottleneckBasedontheprojectsofdevelopingmicro／nanoCMM，theauthorfocusedOlltheresearchofmechanicalbridge，theprecision2Dpositionin

3、gstage，andthetouchtriggerprobesystemIndependentexpcrieTlCeSfromdesigning，processingandtestingofeverysystemconstitutetheimportantpartduringtheresearchInnovativearchbridgestructurewasproposedtOreplacetheconventionalrectang

4、ularbridgestructureThearchbridgestructurehasmuchbetterstability；thedeformationbecameofpressurecomingfromZspindleWasdecreasedmorethan1／3HarmonicanalysisresultsproveditssuperiordynamicperformanceFiniteElementAnalysis(FZA)a

5、ndoptimizationmethodWereextendedemployedinthisresearch，apagodabridgeWasdevelopedtostrengthitsrigidityandstabilitybecauseofthesymmetryinspaceBoththebridgessupplymetrologyreferringbasefortheprecisionmeasurementsCoplanarcon

6、ceptwasdevelopedduringtheresearchofthe2DprecisionpositioningstageItmeanstheguideplanesinXandY&reinthesameheight，aswellasthemeasuringplaneandtheplaneofworkpiececarrierAsaresult，theAbbe’Sarorandthecumulativeerrorcanbereduc

7、edn圯symmetricstructureisanotherhighlightinthisdesigntoeliminatethestructuredeformationbyforceandtemperaturechangeThestagewasdrivenbynanomotor謝thnanometerresolutionanditsdisplacementWasdetectedbyprecisionLinearDiffraction

8、GratingInterferometer(LDGI)ExperimentalresultsshowthatXYstageCantravel25mill、ⅣitllIrmaresolutionandthepositioningrepeatabilityislessthan30nmConventionalCMMsrestrictthepossibilitiesformeasuringmicromechanicalproductsandno

9、ncontactopticalmeasuringmethodsa嗆notsuitablefortruethreedimensionalmeasurementsTheintegratedcombinationofopticalsensorsandmechanicaltransducersemployedinthisresearchmakesallideallowcostandhighprecisiontouchtriggerprobepo

10、ssibletomeasureminiaturecomponents眥stouchprobeiscomposedofastyluswithafibersphereandasensorintegratedfloatingplateTheball卸isfabricatedusingopticalfiber謝mmeltingandsolidificationprocessesBasedonTaguchimethod，thefusingproc

11、essparametersareoptimizedFinefiberspherewith3lOpmdiameterandlessthanl肛mroundnessandcenteroffsetc加befabricated111estylusisattachedtoafloatingplate，whichisconnectedtotheprobehousingviafourmicrowiresTheshapeanddimensionofth