TiO-,2-薄膜的制備及其特性研究.pdf

1、蘭州大學(xué)碩士學(xué)位論文TiO薄膜的制備及其特性研究姓名：譚永勝申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：凝聚態(tài)物理指導(dǎo)教師：王印月20050501蘭型奎堂堡主堂垡堡苧一一——————————』墮!LAbstractBecauseoftheexcellentphotocatalysisandphotoinductionsuperhydrophilia，titaniumdioxidehasbecomeakindofpromisingmaterialsinfie

2、ldsofpholodegradeorganicmolecules，dc—sensitizedsolarcells，antifoggingandselfcleaningInthisdissertationTi02filmsweresuccessfullypreparedbyreactivemagneticsputteringWeinvestigatedtheinfluencesofdepositionconditionsonthestr

3、ucturalpropertiesofTi02filmsandfoundtheoptimalconditionsforthedepositionofTi02filmsbyreactivemagneticspmteringWealsostudiedtheopticalandhydrophiliapropertiesofthefilmsItisfoundthatthestructuralpropertiesofTi02filmsprepar

4、edbyreactivemagneticspuRefingwerestronglyinfluencedbydepositionconditionsincludingsubstratetemperature，theratioofOztoArinmixedgas，andsputteringpressureThestructuresofsamplesdeposimdatdifferentconditionswerecharacterizedb

5、yXraydiffraction(ⅪtD)andatomicforcemicmscope(AFM)TheresultsindicatedthattheoptimalconditionsforthedepositionofTi02filmsareasfollows：substratetemperatureof400℃theratioof02to船of25％andsputteringpressureof0，30PaUVVistransmis

6、sionspectraofthefilmswere：studiedbytheUVV／sspectrometerItfoundthatTi02filmspreparedbysputteringcangreatlyabsorbingultravioletlightTheabsorptionedgeofUVVisspectrawasblue—shiftandopticalbandgapbecamewidenbecauseofquantumco

7、mqnementeffectTheresultsofmeasurementsaboutthewatercontactangleollthesurfaceofthefilmindicatedthatthewatercontactangledecreasedwiththesurfaceroughnessofthefilmincreased，itimprovedthehydrophiliaofthefdmThewatercontactangl