28243.觸發(fā)型真空弧離子源放電特性研究

1、觸發(fā)型真空弧離子源放電特性研究獨(dú)創(chuàng)性聲明本人聲明所呈交的學(xué)位論文是我個(gè)人在導(dǎo)師指導(dǎo)下進(jìn)行的研究工作及取得研究成果。據(jù)我所知，除了文中特別加以標(biāo)注和致謝的地方外，論文中不包含其他人已經(jīng)發(fā)表或撰寫(xiě)的研究成果，也不包含為獲得中國(guó)工程物理研究院或者其他單位的學(xué)位或證書(shū)所使用過(guò)的材料。與我一同工作的同志對(duì)本研究所做的貢獻(xiàn)均已在論文中做了明確的說(shuō)明并表示了謝意。學(xué)位論文作者簽名：萬(wàn)綱司簽字日期：7口／午年4月／口日學(xué)位論文使用授權(quán)的說(shuō)明本學(xué)位論文作

2、者完全了解并接受中國(guó)工程物理研究院研究生部有關(guān)保存、使用學(xué)位論文的規(guī)定，允許論文被查閱、借閱和送交國(guó)家有關(guān)部門(mén)或機(jī)構(gòu)，同時(shí)授權(quán)中國(guó)工程物理研究院研究生部可以將學(xué)位論文全部或部分內(nèi)容編入有關(guān)數(shù)據(jù)庫(kù)進(jìn)行檢索，可以影印、縮印或掃描等復(fù)制手段保存、匯編學(xué)位論文。學(xué)位論文作者簽名：猾簽字日期：歷7可年牛月／013導(dǎo)師簽名：簽字El期：函c少年緲月fo日觸發(fā)型真空弧離子源放電特性研究AbstractThetriggeredvacuumarcions

3、ources(TVAIS)beenintensivelyusedtoprovidehighcurrentionbeamsinfilmdepositionandmaterialsurfacemodificationparticleaccelerationinjection，plasmathrusterandfundamentalnuclearphysicsstudies，primarilyduetothelowbreakdownvolta

4、ge，higharCcurrentandhighrepeatabilityOnthebasisofthereviewonthecurrentdevelopmentsofdischargetheories，triggeringmechanismsandtriggereddischargemodesfortheTVAIS，thepropertiesoftheTVAISbasedonthehigh—voltagesurfaceflashove

5、rdischargemodearestudiedbyusingbothexperimentalandsimulativeapproachesInanattempttofurtherunderstandthemechanismofthehighvoltagesurfaceflashoverdischarge，theelectricfielddistributionandtheelectronandiontemporaldistributi

6、onsinthedischargeprocessaresimulatedbyusingparticleincell(PIC)methodontheassumptionthatinitialelectronemissionbasedontheFowlerNordheimformula，SecondaryElectronEmissionAvalanche(SEEA)theoryandtheimpactionizationmodelforad

7、esorbedgaslayeronaceramicinsulatorsurfaceTheimagesofsecondaryelectronmultiplicationandoccurringofbreakdowninthesurfaceflashoverprocessareacquiredThecharacteristicsoftheTVAISsuchasthetriggervoltage，arCburningvoltageanddel

8、aytimeareobtainedfordifferentmaterialsandgapdistancesResultsshowthatthetriggeredtimedelayoftheionsourceismainlyaffectedbythetriggeringstructure，triggeringcurrentdensityandtriggeringvoltageThereexistlittlecorrelationswith

9、themaingapdistanceandthemaingapvoltageThetriggervoltageisintherangeof7—11kVTheburningvoltageofmainarCisabout30VTheactiondelaytimeisabout20nsfromthebeginningofthetriggerpulsetothetimethatthemaingapvoltagebeginstodecline，w

10、hiletheconductiondelaytimeis130—210nsfromthestartingpointofthemaingapvoltagedecliningtothetimethatthemaingapvoltagestabilizes，andincreaseswiththedistanceofthemaingapThedischargemechanismisstudiedbycombiningahighspeedfram

11、ingcamerawithhiglltemporalspatialresolutionsanddischargeparametermeasurements；theinfuenceofcathodespotsformationandplasmadiffusionontriggeredvacuumarcdischargearealsodiscussedThephotographsofdischargeprocessanddischargeg

12、apareperformedThefactorsinfluencingdischargearealsoanalyzedThetotalioncurrentoftriggeredionsourceismeasuredusingflatprobediagnosticmethodTheresultsdemonstratethestructureoftheionsourceexertsasignificantinfluenceontheionc