基于MEMS的無閥泵數(shù)值仿真與實(shí)驗(yàn)研究.pdf

1、中國(guó)科學(xué)院長(zhǎng)春光學(xué)精密機(jī)械與物理研究所博士學(xué)位論文基于MEMS的無閥泵數(shù)值仿真與實(shí)驗(yàn)研究姓名：白蘭申請(qǐng)學(xué)位級(jí)別：博士專業(yè)：機(jī)械制造及其自動(dòng)化指導(dǎo)教師：吳一輝20050601Simulationsandexperimentalstudiesofvalve—lessmicropumpsbasedonMEMSBai—LanDirectedbyProfessorWuYihuiABSTRACTInordertorealizethedemandof

2、thequantitativetransportationinthemicrofluidicsystem，thetheoreticalanalysis，sireulationsandexperimentalstudiesofvalve—lessmicropumpsbasedonMEMSaredevelopedDiffilser—nozzlemicropumpsaretypicalvalve—lessmicropumpsTheyusedi

3、vergingandconvergingmicrochannelsinsteadofonewayvalvesThesemicropumpsutilizethedifferentpressuredropcharacteristicsofflowthroughanozzleandadiiNsertodirecttheflowinonepreferentialdirection，andhencecauseanetpumpingactionAd

4、ditionalbenefitsofdiflusernozzlemicropumpsincludethesimplegeometryandthematuremanufacturetechnologies，sopeopledrawmuchattentiontothesepumps。NumericaIsimulationsabouttheeffectsofangle，length，minimumwidthanddepthofthediflu

5、sernozzletothemassflowande銜ciencyaredoneusingthecomputationalFluidDynamicsprogramAnsys／FlotranThevibrationmodesofthemembranearestudiedAndthefluidmembranecouplingvibrationprocessisanalyzedtheoreticallytheapproximateanalyt

6、icalsolutionforthecouplingvibrationequationisgivenOnthesebasis，thevariationrulesofmembraneamplitudeandthemassflowofthepumpareanalyzedunderdi療crentdampingtoefficientsdifierentforcesanddiffbrentnaturalfrequenciesThedynamic

7、workingprocessofvalve1essmicropumpsandthevariationruleofmassflowandaccumulativemassflowunderdifferentamplitudeandfrequenciesareanalyzedwithCFXThemassflowresultsofsimulationsandtheexperimentalstudiesmatchbasicallyThevalve

8、—lessmicropumpsaremadebymicromachingtechnologieswithsiliconAndthemembranesaremadeofPDMSGlasssilicon—glassmakesupthesandwichstructureofthepumpTheoutputabilitiesofthevalve—lessmicropumpsunderdifferentvoltages，differentfieq

9、uenciesanddifferentmembranestifineSSaremeasuredthroughtheexperimentsTheexperimentsalsoshowthatthevalve—lesspumpcanbeusedbothasaliquidpumpandasagaspumpThemassflowofthegaspumpishigherthantheliquidpumpunderthesamevoltage，bu

10、tbackpressureofthegaspumpislowerThemaximummassflowoftheliquidpumpisO44ml／minwhenthevoltageis8Vandthefrequencyis15Hznlemaximumbackpressurecanreach175cmH20Keywords：MEMS；valve1essmicropumps；diffuser／nozzle；FiniteElementsimu