陶瓷恒速率變向摩擦化學(xué)研磨的實(shí)驗(yàn)研究.pdf

1、哈爾濱工業(yè)大學(xué)碩士學(xué)位論文陶瓷恒速率變向摩擦化學(xué)研磨的實(shí)驗(yàn)研究姓名：王永良申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：機(jī)械設(shè)計(jì)及理論指導(dǎo)教師：翟文杰20050601AbstractWiththedistinguishedpropertiessuchashi曲anti—wearanti—corrosionhighbrittlenessandlowerfracturetoughness，siliconnitrideandaluminaceramicarehar

2、dtoreachtherequiredhi曲precisionsurfacequalitybytheconventionalultraprecisionmanufacturingtechniquesTribochemicalPolishing(TCP)techniqueisannewmanufacturingtechnologyforceramicmaterials，whichCanacquiredefect—free，stress‘f

3、reeandsupersmoothnesssurface(surfaceroughnelessthan10nm)throughtribochemicalatcontactbetweenpolishingpadandworkpieces，whichmadethecontactingasperitiestoasperitiesdissolvefirstlyThispaperhasinvestigatedtwokindofceramics’t

4、ribochemicalpolishingcharacteristicsbyusinganewly—developedpolishingmachineaccordingtothepropertiesoftwoceramicmaterialsThefollowingmainworkshavebeendone：Thegeartraintypeplanetarymovingpolishingmachinecharacterizesbyamov

5、ementwithsamevelocitybutitsdirectionchanginggraduallywithallpointsonthesurfaceoftheworkpiecehavingsametraveldistanceandconstantrubbingspeedbutavaryingdirection，highsurfacequalityandpolishing—rateCanbeassuredAccordingtoth

6、erubbingpropertiesofsiliconnitrideandaluminaceramic，thetribochemicalpolishingcharacteristicoftwokindofsiliconnitrideceramicsandonealuminaceramicmatingwithdifferentpairsinvariousoffluidshavebeenstudiedthefrictioncoefficie

7、ntandwearparameterhavebeenmeasured，andtheworkpieces’polishingsurfacequalityhavebeenobservedaswellasthepolishingcharacteristicandmechanismThispaperprovidemanytechnicalparametersforsiliconnitrideandaluminasuchasfluid，load，