相移干涉儀仿真分析及模塊化設(shè)計研究.pdf

1、聲明本學(xué)位論文是我在導(dǎo)師的指導(dǎo)下取得的研究成果，盡我所知，在本學(xué)位論文中，除了加以標注和致謝的部分外，不包含其他人已經(jīng)發(fā)表或公布過的研究成果，也不包含我為獲得任何教育機構(gòu)的學(xué)位或?qū)W歷而使用過的材料。與我一同工作的同事對本學(xué)位論文做出的貢獻均已在論文中作了明確的說明。研究生簽名：奎墨i壁加一年；月L日學(xué)位論文使用授權(quán)聲明南京理工大學(xué)有權(quán)保存本學(xué)位論文的電子和紙質(zhì)文檔，可以借閱或上網(wǎng)公布本學(xué)位論文的部分或全部內(nèi)容，可以向有關(guān)部門或機構(gòu)送交并

2、授權(quán)其保存、借閱或上網(wǎng)公布本學(xué)位論文的部分或全部內(nèi)容。對于保密論文，按保密的有關(guān)規(guī)定和程序處理。研究生簽名：加77年，月V日Abstract碩士學(xué)位論文AbstractPhaseshiftinterferometerisallopticalmeasuringinstrumentbasedonfourstepphase—shiftingmeasurementWithdecadesofdevelopment，itwillsoonbeincl

3、udedinthenewflatnessmeasuringstandardsThisarticleiSbasedonphase—shiftinterferometerwedesignaflatnessmeasurementsystemforprecisionopticsThesystemreplacesthetandeminterferometerandtheequalthicknessinterferometerusedinconve

4、ntionalflatcrystalmetering，improvethesamplingaccuracywhilemaintainingtheoriginalsamplingindexensuretheversatilityofmeasurementandadvanced111thedesigningprocessofmetrologicalphaseshiftintcrfcrometer，weintroduceamethodcall

5、edmodulardesignWedividethehardwareandsoftwareintoseveralmodulesaccordingtodifferentfunctions，eachmodulecorrespondstoaspecificrequirementInthewholesystem，wemainlystudythetestingmoduleofhardwarepartandtheimageprocessingmod

6、uleofsoftwarepart，calculatetheflatnessdataoftesingcomponentsintheoriginalmeasurementstandard，provethatcompatibilityofphase—shiftinginterferencewithtraditionalmeasurementmethodsInthispaperweuseopticalmodelingsoftware‘FRED

7、’tocompletesimulationandanalysisofpartsofmodule’Sinthemeasurementofphase—shiftinterferometerWeestablishedtheopticalpathmodelaccordingtothebasicparametersoftheinterferometerselectspecifiedcoherentlightfortracingandtesting

8、，discussthescatteringlight’SdistributioninsidethesystemModelzoommodulebythelensparameters，analysistheinfluenceofimagewithdifferentreflectivityofprisminthesplittermodule，comparetherelationshipbetweenthehotspotsofpairingpo

9、intmoduleandthescatteredlight，provethefeasibilityoftestmoduleAftermeasuringtheflatnessoftheflattenedandpolishedsurfacesusingmetrologicalinterfbrometer’wecalculatetheflatnessofeachelementundertheconditionofphaseshiftinter

10、ferenceMeasuretheflatcrystalusingabsoluteinspectionmethodofthreesidesmutualinspection；comparetheresultsofdirectingmeasurementandbuiltinprogram，comeupwithawell—fittedconclusion；usetwokindsofmethodsfortiltingmeasurementand

11、imagesplicingmeasurementcomeupwiththeconclusionthattheflatnessofpolishedsurfaceis03019mbytiltmeasurement，03799mbyimagestitchingmeasurement，themeasuringresultshowsthatthedatadeviationissmall，thispolishedsurfaceiSfulfillth