射頻感應(yīng)耦合等離子體調(diào)諧基片自偏壓特性的實(shí)驗(yàn)研究.pdf

1、大連理工大學(xué)碩士學(xué)位論文射頻感應(yīng)耦合等離子體調(diào)諧基片自偏壓特性的實(shí)驗(yàn)研究姓名：霍偉剛申請學(xué)位級(jí)別：碩士專業(yè)：等離子體物理指導(dǎo)教師：丁振峰20050601射頻感應(yīng)耦合等離子體調(diào)諧基片自偏壓特性的實(shí)驗(yàn)研究CharacteristicsofthetunedsubstrateselfbiasinaRFinductivelycoupledplasmaAbs仃actTheresearchgroupfirstperformsimprovementso

2、ntheexperimentequipmentBymeansofaddingthefilterintotheoriginalgridcircuitofRFpowersource，therippleeffectisreduced，andthestabilityofICPiSstrengthenedTheeffectofmatchingnetworkoncapacitivecouplingofplasmaisstudiedBycompari

3、ngthemeasureresultswithdifferentdischargeantennas，thebettermeasurementmeansandconditionsarefoundSomeimprovementsareperformed011thecapacitivecouplingprobetoincreaseitsfrequencyrange，Inthisease，itcouldmeasuretheDCvoltsandR

4、FvoltsrespectivelyWealsostudyandmodifytheRFLangmuirprobe，Byaddingtuningcircuit，theinterferenceofprobemeasurementcausedbythe1356刪ZsignaliSdecreasedDuringthecourseofmeasurementtheproblemofprobetinepollutioncausedbyimpurity

5、inthevacuumroomisresolvedbysoftwarecontrol，whichisusedtoheattheprobetineBythisway，theprobecouldbeusedrepeatedlyMoreresearchesaredonetostudytheimpactofsubstrateembranchmentresistanceinseriesonsubstrateself—bias，andfindthe

6、phenomenonofse]f—oscillationWestudytheinfluenceontheself—bias—tuningcapacitorcurvemadebytheaxialplaceofsubstrateWealsostudythesubstrateselfbiasjumpeddelay，doublesteadydelayandself—oscillationetcwiththeconditionofcopperbe

7、ltdischargeantennas，andcomparewithdatumwhichareobtainedwiththeconditionofredcoppertubedischargeantennasByUSingtheself—designedRFLangmuirprobetheelectrontemperature，theverticalandcrosswisedistributionofelectrondensityaSwe