射頻感應(yīng)耦合氬等離子體的Langmuir探針和發(fā)射光譜診斷.pdf

1、大連理工大學(xué)碩士學(xué)位論文射頻感應(yīng)耦合氬等離子體的Langmuir探針和發(fā)射光譜診斷姓名：張健申請學(xué)位級(jí)別：碩士專業(yè)：等離子體物理指導(dǎo)教師：任春生20061201大連理工大學(xué)碩士學(xué)位論文ThediagnoseofradiofrequencyinductivecoupledArplasmawithLangmiurprobeandemissionspectrumAbstractFortheexperiment，thecylindricalra

2、diofrequency(rf)inductivelycoupledArgonplasmahasbeenstudiedbyLangmuirprobeandemissionspectrumIntheexperiment，theparametersoftheplasmavarieswithpressureinaxialandradialdirectionhasbeenmeasuredwhichthereisnothingaddingbetw

3、eentheantennacoilsTheemissionintensityofAratomandArionvarieswithpressureinaxialdirectionwerealsomeasuredTheeffectofcuspmagneticfieldtoplasmawasstudiedTheplasmaparameterswithandwithoutcuspmagneticfieldhavemeasuredwhichvar

4、ieswithpressureandpowerinaxialandradialdirection，andthecomparisonsofthemarealsoshowedWhennothingisaddedbetweenantennacoils，bymeasuringitcanknowitproduceuniform，stableandhighdensityplasmainthemiddleandtopofthedischargecha

5、mber，butitfallsatthetarget，andbelowthemiddleofthechambertheplasmaweakensslowly；inradialof由一7cmtheplasmaparametersarechangeslightlyalsoproduceuniformstableplasmaTheparameterschangerapidlyattheedgeofthechamberAndusingtheem

6、issionspectrameasuredtheintensityofAratomof75013nminplasmainaxiswithpressuretheintensityofArionof4348nmvariedwiththepressureintheaxisandtheratioof4348ninAriontothe4300nmAratomvariedwithpressureinthreepositionoftheaxiswer

7、ealsomeasuredTheeffectofthecuspmagneticfieldtotheplasmahasbeenstudiedintheexperimentIntheexperiment，itwasfoundthatwhenaddingthemagnetsbe饑vecntheantennacoils，therfpowerwillbeabsorbedbythem，forthesameconditionwithaddingcus

8、pmagneticfieldsotheconditionofwithoutcuspmagneticfieldisinsteadofbyaddingstainlesssteelringsWhenaddingthecuspmagneticfieldbetweentheantennacoils，theplasmadensityincreasedgraduallyinaxialdirectionAndthevaluesarelargerthan

9、withoutmagneticfieldobviouslyInradialdirection，theplasmadensityincreasedgradually，andreacheditsmaximumnearthechamberwallwherethestrengthofthemagneticfieldislargestButatchamberwalltheplasmadensitydecreasedrapidlyandreache

10、dtheminimumWithoutthecuspmagneticfield，theplasmadensitydecreasedrapidlynearthechamberandalseachedtheminimumatthewallTheplasmadensityincreasedandthedistributioninradialdirectionbecamemoreuniformwhenaddingthecuspmagneticfi