用于均勻照問題的衍射光學元件研究.pdf

1、中國科學技術大學碩士學位論文用于均勻照問題的衍射光學元件研究姓名：徐俊中申請學位級別：碩士專業(yè)：光學指導教師：李永平2002.6.1!里型墊杰蘭堡主堂竺堡_空些王塑塑墨塑囹望塑塹!!堂堂歪堡墮塑AbstractDiffractiveOpticalElements(DOE)，especiallythephaseelementswithcontinuousdistributionofreliefstructureonthesurfaceof

2、theopticalmaterials，hasbeenonekindofthemostimportantopticalelementssincetheendoflastcenturyUniforillIllumination(UI)iSapopularresearchfieldinresentyearswhichCallbeusedintheresearchfieldofinteractionbetweenlaserandmateria

3、lsorintheopticalinformationprocessingTheresearchdevotedtomyMasterthesisfocusesonthedesignandfabricationofDOEwithlargecaliberandcontinuousphasedistribution，whichCallbeusedtesolvetheUIproblemStudyoffinesamplingintervalsint

4、henumericalsimulationanddiscussionabouttheevaluationcriterionoftheoutputintensitydistributionintheobservationplanearepresentedSuchworkprovidesfundamentalbasisfortheprecisedesignmethodwitllhighaccuracydemandedbyunifcIHnil

5、luminationTheversatilityoftheDOEhasbeendiscussedwhichshowstherelationshipbetweentheOUtputlaserbeamprofileandsomespecificparametersofthepracticalsystemThedesigntheoriesandapproachesaboutDOEhavebeenoutlinedandflthoroughcom

6、parisonamongthedesignalgorithmshasbeendiscussedAfteranalysis，QuasiGradientDescentAlgorithm(QuasiGD)ispresented，whichcombinestheglobaland10caloptimizationalgorithmsFourierfiltermethodiSalsopresentedtoavoidthemutationofthe

7、phasedistributionprofileAnewhybridalgorithmiSputforward，whichcombinesiterationalgorithmQuasi—GDandFourierfiltermethodUsingtllisalgorithm，wesuccessfullydesignedDOEforquasi—annularbeamshapingof“SGII’’laserdriverandforbeams

8、hapingtealizerectangularunif01TnspotConsideringthehighunifortuityofthesimulatedresultandthesignificantdecreaseofcomputeringtime，thisnewhybridalgorithmperformsbetterthancommonalgorithmsinthedesignprocess1DScanningIonBeamE

9、tchingTeehniqueiSdevelopedtofabricatetheelementswithoutcircularsymmetryforrectangularspotoutputTheprincipleandthefeasibilityofthemethod，whichfeaturesintransformingthe2Dphasedistributiontothesummaryoftwo卜Dphasedistributio

10、ns。arepresentedThedesignofmaskforthisteehniqtleiSalsointroducedToimprovethemachiningaccuracyofRotationalScanningIonBeamEtchingTechnique，fabricationerrorscausedbytheun—uniformityoftheionbeamintensityandthealignmenterrorbe