10.6μmteaco,2激光光學薄膜損傷閾值研究

1、華中科技大學碩士學位論文10.6μm TEA CO激光光學薄膜損傷閾值研究姓名：鄒亮申請學位級別：碩士專業(yè)：光電信息工程指導教師：余文峰20080531IIAbstract In high power TEA CO2 laser systems, optical coating’s performance is a key technical problem which restricts the increase of the las

2、er power and the laser beam quality. Fundamentals of laser-induced damage in high power TEA CO2 laser systems were discussed in this thesis, and laid a strong emphasis on how to improve laser-induced damage threshold of

3、optical coating. Several damage mechanisms of laser-induced damage of coating were discussed. The damage mechanism varying with radiation manner and laser parameters was also analyzed. Introduced several methods of testi

4、ng damage threshold of coating, both mechanism and method in several threshold test were discussed; the characteristic of different methods was analyzed. Anti-injury coatings in high power TEA CO2 laser systems were desi

5、gned and manufactured. Several methods of dealing optical coating to improve damage threshold were discussed. Consult idiographic condition, the feasibility of using large area laser spot was proved, the variety of damag

6、e threshold under the influence of large area laser spot was also theoretical and experimental studied in detail. The mechanism of damage threshold variety of 10.6µm optical coating under different laser conditionin

7、g condition was gained, and the damage threshold of 10.6µm optical coating was successfully improved. The relationship between laser-induced damage thresholds of optical coating and thickness of substrate of optical

8、 coating was investigated experimentally. The results show that higher damage threshold could be gained when coatings were on thicker substrate. The variety in characteristic of both oxide and oxide-free optical coating

9、s after ion post-treatment was analyzed; the mechanism of improving laser-induced damage threshold by ion post-treatment was clarified further. Key words： Pulse TEA CO2 laser Optical coating Laser-induced damage thr