30061.mems熱式風速風向傳感器封裝技術(shù)研究

1、東南大學碩士學位論文MEMS熱式風速風向傳感器封裝技術(shù)研究姓名：顧興蓮申請學位級別：碩士專業(yè)：電子科學與技術(shù)；微電子學與固體電子學指導教師：秦明20110422ABSTRACTMeteorologicalmonitoringiscloselyrelatedtoindustriala11da鰣culturalproductionandpeople’sdailyliVes，柚dplays鋤importantroleiflmanyfields

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14、testedontheb嬲isofthesesimulationandtesting，thepapersimulatedtheperfIonIlanceofthewindsensoratbothunpackaged鋤dpackagedst王咖seswimdi虢rentheatingpoweratnowindstale、difI’erentwindspeed、di仃erentwinddirectionsThesimulationresul

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