鈦酸鍶鋇非線性鐵電薄膜的尺寸效應(yīng)研究.pdf

1、電子科技大學(xué)碩士學(xué)位論文鈦酸鍶鋇非線性鐵電薄膜的尺寸效應(yīng)研究姓名：趙莉申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：材料學(xué)指導(dǎo)教師：楊傳仁20050301電子科技大學(xué)碩士論文AbstractInthisthesis，therelationshipsofthedielectricpropertieswiththemicrostructures，thicknessesandgrainsizeswerestudiedFirsttheBSTmiflfilmswere

2、preparedattheoptimizedparametersbyRFmagnetronsputteringandannealedbytwoposttreatments：RTAandtube—furnaceHowthefactors，temperature，atmospherecta1，ofthesepostannealedmethodsinfluencedthemicrostructures(crystallization，orie

3、ntation，roughnessdegreeofsurface，andthegrainsizes)ofBSTthinfilmswasinvestigatedAndtheeffectivemethodofcontrollinggrainsizesofBSTthinfilmswasgotatlastSecond，thedielectricpropertiesofBSTthinfilmswasmeasured：thedielectricco

4、nstantWaS746thelosstangentdatawas17％Thecuresofer—f’D—f￡r—VweregotandthereaSonsofwhythesecureswerechangedasthatmannerweregivenandprovedAtlast，basedontheupwardstudies，thedifferencesoftheelectricpropertiesofBSTthinfilmswhic

5、hhaddifferentthicknessesandgrainsizeswereexperimentedTheresultsareasfollows：①theBSTthinfillsofthesamethickness，thelargerthegrainsizes，thehigherthedielectricconstantand△￡were；②withtheincreasingofthicknessesofBSTthinfilms，

6、thedielectricconstantwasincreasedatfirstandappearedamaximumat650nto，thendecreased；③the△ewasalsounequalatdifferentthicknessesThemaxJmulnappearedatthethinnestfilms(260hm)，theminimumatthefilmswhichhadthehighestdielectriccon