定向沉積技術(shù)制備NdFeB-X-Ti薄膜及磁性能的研究.pdf

1、Y827C5”女啦丑強L刪盎王眥：—』色上L蛾撾凈JIANGSUUNIVERSITY☆№—』芷吐％u工墮理釜咝壬碩士學(xué)位論文MASTER’SDISSERTATloN回論文題目：一一盤剝耳詛臣豐型缸螂掣蛆強——alg紐＆＆濁蟹癯學(xué)科擘、№：姐莖蟄量作者姓名：til墨壘指導(dǎo)教師：～』如日喜答辯H期：——勘正“f江蘇大學(xué)碩士學(xué)位論文ABSTRACTPreparationcraftoforientateddepositiontechniques

2、，configurationofsurface，andmagneticpropertiesofNdFeBIX／TithinfilmswerestudiedmainlyToacquireNdFeB／X／Tithinfilmsofgoodmagneticproperties，orientateddepositiontechniqueswereusedtomakesurfaceofthinfilmsforrnorientatedcolumna

3、rcrystals，andthemechanismsofgoodmagneticpropertieswasexplainedNdFeB／X／TithinfilmsweredepositedbyDCandRFmagnetronsputteringtechniquesThepropertiesofthinfilmswerecharacterizedbyseveralanalysistechniques，suchasAFM，VSM，XRD，’

4、FEMandSOonnleresultsshowthatNdFeB／Tithinfilmspreparedbyorientateddepositiontechniqueswerecrystallinebecauseorientateddepositiontechniquesarethatthinfilmsareheatedbyproperwayinsputtering，andtemperatureofthinfilmsbeingsput

5、teredincreasesfrom400。Cto500。CAFMshowsthatNdFeB／Tithinfilmspreparedbyorientateddepositionformcolumnarcrystalsofsingledirection、whichdirectionisperpendiculartofilms’surfaceNdFeB／Tithinfilmsoforientatedlycolunmarcrystalsha

6、vegoodmagneticanisotropicpropertyNdFeB，nthinfilmspreparedunderpropercraftoforientateddepositionwereheattreatedatdifferenttemperatureandtestedbyAFM，XRD，VSMandSOonTheresultsshowthatconfigurationofsurfaceofNdFeB／Tithinfilms

7、preparedbyofienmteddepositiontechniqueschanges、橢tllthechangeheattreattemperatureasheattreattemperaturebelow5000C，thinfilms’grainrefineswiththeincreaseofheat—treattemperature，asheattreattemperatureabove5000C，thinfilms’gra

8、incoarseswiththeincreaseofheat—treattemperatureAsheat—treattemperatureis5000CthemagneticpropertiesofNdFeB門nthinfilmspreparedbyorientateddepositiontechniquesarebestrelativelynleheattreathasnoobviouslyimprovementforthecoer

9、citiveforceofNdFeB，TithinfilmspreparedbyorientateddepositiontechniquesthecoercitiveforcehasbeenperfectrelativelyThemagneticpropertiesofNdFeB／Tithinfilmspreparedbyorientateddepositiontechniqueshasnoobviouslyimprovement111

10、eorientateddepositiontechniquesisapracticalandeffectivewayforpreparingmagneticthinfilms，itsuniquemeritisthinfilmsareheatedinsputteringwithoutheattreat，andhavegoodmagneticpropertiesKEYWORDS：orientateddeposition，NdFeBthinf