物體表面三維形貌的光學精細檢測技術研究.pdf

1、山東大學碩士學位論文物體表面三維形貌的光學精細檢測技術研究姓名：司書春申請學位級別：碩士專業(yè)：固體力學指導教師：王蘊珊2000.11.23山東大學研究生畢業(yè)論文稿紙StudyonOpticalPrecisionMeasurementTechnologyfor3DSurfaceABSTRACTInthispaper，thesignality、developmentandprospectsoftheSurfaceMicrotopograph

2、yisreviewadbriefly，andThevariousmeasurementdevicesofsurfacemicro—profilewidelyusedinlaboratoryandindustryaredifficulttobeappliedinportableandinshopfloortwosurfacemicro—profilemeasurementsystemswithdifferentprinciplesared

3、evelopedTheonebasedonProfilometryofprojectedgratingwithmicronhorizontalresolution，sub—micronverticalresolutioniSsuitforroughsurfaceandanotherbasedonMichelsoninterferometerwithmicronhorizontaIresolution001micronverticalre

4、solutioniSsuitforSuperfinesurfaceTWOshifterisdevelopedforthetwosurfacemicro—profilemeasurementsystemstOcontrollthemovingoftheprojectgratingaccuratelyThePMMAdiskprocessedbyquasimoleculelaseriSmeasuredbythesurfacemicro。pro

5、filemeasurementsystemsofprojectedgrating，andthesampleprocessedbymulleriSmeasuredbythesurfacemicro—profilemeasurementsystemsofMichelsoninterferometerInthispaperanewtypeoffilter(non—axisymmetricfilter)usedinFouriertransfor

6、mprofilometryhasbeenpresented，thisfilterwillbeusefulforthemeasurementwhentheshapeisnon—axisymmetricintheFourierDomainThenon—axisymmetricfilterisusedsuitablyCanhelptokeepmorehiglIfrequencydetailsometimesTwoStepPhase—Shift

7、inginFouriertransformprofilometryhasbeenpresentedThezerofrequencyiskilledbycalculationwithtwodifferentshiftingimageswimthisthefundamentalfrequencyspectrumCanbeseperatedfromtheothereventhefundamentalfrequencyspectrummixed

8、withthezerofrequency，andthefilterisbroadenintheSalTletimetohelpholdmorehighfrequencyInphasemeasuringprofilometry(PMP)，anewcalibrationalgorithmofphase—shiftingbasedonfastFouriertransform(FFT)ispresentedWiththehelpofcomput

9、eremluator，itisfoundthatapeakappearatdoublefundamentalfrequencyspectrumoffringepaReminFourierDomain，whenthereisafixederrorineachstepofthemovingoftheprojectgratingBasedonthis，anewmethodoftesterrorinFourierDomainispresente