薄膜三維生長的Kinetic Monte Carlo模擬.pdf

1、華中科技大學(xué)碩士學(xué)位論文薄膜三維生長的KiicMonteCarlo模擬姓名：張雪鋒申請學(xué)位級別：碩士專業(yè)：凝聚態(tài)物理指導(dǎo)教師：劉祖黎20040701IIIAbstractFalongtimeaconsiderablenumberoftheeticalexperimentalstudiesarefocusedonfilmgrowth.suchfilmsarewidelyusedinmodernopticalelectricdevicesi

2、ncatalysisindustry.Manypropertiesofoptelectronicthinfilmdependonthefilmmphologytexturemicrostructure.Themphologyofathinfilmisinfluencedbytheatomlevelgrowingprocess.STMAFMarethemaindevicestostudytheatomlevelprocessinexper

3、iment.AtthesametimemanytheeticalmodelsaboutthinfilmgrowthhavebeenproposedsuchasDLAtransitionstateetc.Withdevelopmentofcomputerthenewalgithmcomingfthsimulatingthegrowthofthinfilmsinlargescalebecomesavailable.Bysimulationo

4、fthinfilmsgrowthsomemicroscopicprocessescanberevealedinextremeconditionsuchashightemperaturehighdepositionrate.InthispaperweproposeathreedimensionalmodelusingthekiiclatticeMonteCarlomethodinwhichtheprocessesofdepositiond

5、iffusionareincluded.Ahashingarraywasconstructedtostethecodinatesthediffusionratesofatoms.Byutilizinghashingsearchalgithmtheatomwhichwilljumptoanemptylatticesiteissooned.Sowecansimulatethegrowthofthinfilmsinlargescale.The

6、threedimensionalmphologymicrostructuresofCufilmhavebeeninvestigatedinthismodel.Theeffectsofincidentanglethedepositionratetemperatureonthemphologyoffilmswerestudiedindetailsinthispaper.Theresultsshowthatthecolumnswillfmwh

7、enthedepositionrateishightheincidentangleislarge.Thisisinagreementwiththeexperiment.Keywds:thegrowthofthinfilmskineticMonteCarlothreedimensionalmodelthemorphologyofathinfilmincidenceangleinclinedangleofcolumnsthetangentr