碳納米管陣列薄膜的合成及氣敏性能的研究.pdf

1、天津大學碩士學位論文碳納米管陣列薄膜的合成及氣敏性能的研究姓名：楊震濤申請學位級別：碩士專業(yè)：材料學指導教師：侯峰20070601ABSTRACTCarbonnanotube(CNT)isakindoftypicalone—dimensionalnanomaterialDuetoitsspecialstructureCNTshavegoodabsorptionpropertiesforgasThegassensormadefromCNT

2、shasbeaersensitivitylowerworkingtemperatureandsmallerdimensionVerticallyalignedCNTsfilmdisplaysexcellentgas—sensitivityHowever’thereisstilllackofamaturetechniqueforfabricationofCNTbasedsensordevicesThekeytotheapplication

3、ofCNTsarrayasgassensorsishowtosynthesizetheCNTswiththedesiredstructureandpropertyInthispaper，CNTsarrayfilmswerefabricatedontheA1203andSisubstratesbyaphysicalmethodandthedirectchemicalvapordeposition(CVD)processTheinfluen

4、cesofthepreparationmethods，thetechnologicparametersoffabricationandthechoiceofsubstratesonthegassensitivityofCNTsamywerestudiedCNTswerepreparedthroughcatalyticcrackingofC2IhinArflowThemetalliccatalystwasobtainedbythecopr

5、ecipitationofFe(N03)3‘9H20andMg(N03)2’9H20GassensorwasfabricatedbycoatingtheCNTsontoaA1203substrateMeasurementshowedthatthegassensorthusmadeexhibitedpoorsensitivitytogases，withoutdetectablesignalstoNH3NitrogendopedCNTswe

6、repreparedonA1203andSisubstratesbythedoubleinjectionmethoddevelopedinthislabFerrocenewasusedasthecatalyst，andthemixtureofethanolandethylenediamineasthecarbonsourceandnitrogensourcerespectivelyScanningelectronmicroscope(S

7、EM)，transmissionelectronmicroscope(TEM)andX—rayphotoelectronspectroscopy(XPS)wereusedtostudythemorphologiesandstructuresoftheCNTsTheresultsshowedthathighlypureandorientedCNTsarrayfilmswereobtainedusingthefollowingsynthes

8、isconditions：synthesistemperature950。C，growthtime60min，theinjectionrateofethylenediamine50ml／h，ferroceneconcentrationinethanolO0125∥mlandtheinjectionrateIO0ml／hThethicknessofCNTsontheA1203substrateswasabout160pm，and83I_t

9、monSisubstratesThegassensitivitymeasurementsindicatedthatthegassensorfabricatedundertheaboveoptimizedconditionspoccessedexcellentsensitivitiestoArandNH3ThegassensorsfabricatedbygrowingtheCNTsontheA1203substratedisplayeda