用于氣體檢測的MEMS電容式紅外光強(qiáng)探測器的設(shè)計與制備技術(shù)研究.pdf

1、中國科學(xué)技術(shù)大學(xué)碩士學(xué)位論文用于氣體檢測的MEMS電容式紅外光強(qiáng)探測器的設(shè)計與制備技術(shù)研究姓名：楊地委申請學(xué)位級別：碩士專業(yè)：檢測技術(shù)與自動化裝置指導(dǎo)教師：張正勇20110506AbstractIAbstractThegasanalysisisnotonlyusedinthetraditionalindustrylikeminesafetychemicalprocesscontrolpublicsafetypollutionmoniti

2、ngagriculturalfacilitiesetcbutalsoinhealthcareeveninbiologicalsciencemicroelectronicsnewmaterialsnewtechnologymeme.Weintroduceseveralgasdetectingmethodswhichareputintopracticalapplicationcurrentlytheirrespectiveadvantage

3、sdisadvantagesthencomeupwithgreatsignificanceofinfraredgasdetectingmethodsSummarizingthepredecesssresearchachievementsthispaperproposesakindofMEMScapacitiveinfrareddetectbasedoninfraredabsptionofgasfgasdetecting.Theparal

4、lelplatecapacitwithadoublecapacitancestructurecaneffectivelyrestrainstheeffectoftemperatureotherenvironmentalfactsonthestabilityoftheinfrareddetect.Afterconfirmingthebasicstructurethepapergivesdetailedintroductiononitspr

5、eparationmaterial.GettingtheheatdistributiononcavitywallthethermalstressdistributiononelasticthinfilmthroughANSYSsimulationcombiningwiththeprocessrealizingwedeterminethebetterstructuresizeofthecavitythicknessoftheElastic

6、filmplatespacingoftheparallelplatecapacit.MEMSprocesstechnologyisakeyfactfmicrosystems’implementationinthispaperwemakeacomprehensiveresearchontheprocessinvolvedinthepreparationofinfrareddetectthencombinevariousprocesstec

7、hnologytoachieveoptimalexpecteddetectionindex.Wethehalfbridgedetectingcircuitwithanoperationalamplifiertowardthedetect’stinycapacitanceoutput.Thiscanensurereferencecapaciteffectivelyrestrainoutsideinterferencefacts’effec

8、tontheoutputsignalalsochangethenonlinearrelationshipbetweenthecapacitancewithplatespacingintoapproximatelinearrelationshipbetweenvoltageoutputinfraredlightintensity.Accdingtotheeticalderivationresultswewkouttheacteristic