多層彎曲磁芯結(jié)構(gòu)磁驅(qū)動(dòng)微執(zhí)行器的研究.pdf

1、合肥工業(yè)大學(xué)碩士學(xué)位論文多層彎曲磁芯結(jié)構(gòu)磁驅(qū)動(dòng)微執(zhí)行器的研究姓名：楊友文申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：微電子學(xué)與固體電子學(xué)指導(dǎo)教師：王建華2003.4.1StudyontheMagnetdrivenMicroactuatorWithaMultilevelMeanderMagneticCoreABSTRACTMEMS(Micro—ElectroMechanicalSystem)，anewemergingtechnology，introjects

2、themicroelectronictechnologyandtheprecisemachinemachiningtechnologyMicrosensor，microactuatorandmicroelectronicmechanicalcomponentshavebeenstudiedextensivelyinrecentyearsThisthesisprobestothemodelingandsimulatingofoneofME

3、MSdevicesamagnetdrivenmicroactuatorwimamultilevelmeandermagneticcoreAfterthebriefaccountofthecontents，traits，applicationanddevelopmentoftheMEMSathomeandabroad，theworkprincipleofthemagnet—drivenmicroactuatorandsomeotherki

4、ndsofmagnetdrivenmicroactuatoranditsapplicationarediscussedThemacroandmicrocosmicanalysiswhichbasedontheenergyarediscussedinthepaperThemacromodelwhichisbasedontheequivalentmagneticcircuitprincipleisfoundInthedesignofMEMS

5、，theresolutionmodelofeveryessentialdevice，theaccuratenumericanalysisandcalculationalerequiredtoachievemorepreciseandrationalanalyzedresultsFiniteelementanalysismethodinelectromagnetismcalculationisemployed，basedonwhichth

6、e2DmodelisestablishedandanalyzedthroughtheANSYS，andtheprocessandresultsofthesimulationaredescribedThedistributingofthemagneticfield，fluxdensityandtheforcethrowonthecantileveraresimulatedprimlybythemodelAimingatconfirming

7、theresultsofANSYSanalysis，itiscomparedwiththeresultsoftheresolutivemodelTheresultsindicatethattheANSYSmodelstimulatestheworkofmicroactuatorperfectlywhichhasgreatsignificanceinthechoiceofmaterialandtheeffectrealizationoft