激光微加工制作的光纖法珀高溫溫度與折射率傳感器研究.pdf

1、電子科技大學(xué)碩士學(xué)位論文激光微加工制作的光纖法珀高溫溫度與折射率傳感器研究姓名：孫東申請(qǐng)學(xué)位級(jí)別：碩士專(zhuān)業(yè)：光學(xué)工程指導(dǎo)教師：饒?jiān)平?0100501ABSTRACTABSTRACTMeasurementofrefractiveindexandtemperatureareofgreatimportanceinthefieldofmetallurgyelectricitychemicalindustryaerospaceandSOonOpt

2、icFiberSensingtechnologyWaSgainedmoreandmoreattentionbecauseofitsinherentadvantagesandhadinsurmountablecompetitivenessoverelectricsensorsinthesefieldsThispaperdealswiththemanufactureprocessandcharacteristicsoflaserproces

3、sedandminiaturizedfiberopticFabryPerottemperaturesensorsandphosgeneFabry—PerotrefractiveindexsensorsAndtheresearchresultswillbesummarizedasfollowsAnovelminiaturefiberopticFabryPerotrefractiveindexsensormachinedby157nmlas

4、erisproposedThesensorheadconsistsofamicroairF—Pcavitynearthetipofasingle—modefiberandhaveamicrochannelonthefibertipThemicrochannelisusedastheentranceforliquidundertestTwothmfilmsthatarecoatedatreflectiveinterfacesoftheFP

5、cavityasmirrorsareensurehighopticalcontrastrespectivelyinexperimentARIresolutionof1130887nm／RIunit(RaU)isachievedSuchasensorhasalotofoutstandingadvantagescomparedwithotherfiberopticRIsensors，forexampleverysmall，rigid，hig

6、hresolution，excellentlinearitywidemeasurementrange，eta1ItisanticipatedthatthisminiaturesensorcouldmeettherequirementsforpracticalapplicationsandfindimportantapplicationsinanycaSewheresmallsensorsizeisessential，suchasinbi

7、omedicaldiagnosticLaserprocessedquartzfiberopticFabry—PerottemperaturesensorsAmethodmanufacturingminiaturefiberopticFabryPerothightemperaturesensorsisprovidedThesensorismanufacturedbylaserbeamgroovingoneendofcommonsingle

8、modefiberandthenweldingthenotchsectiontosiliconsinglemodefiberFringesoftheminiaturizedfiberopticFabryPerothightemperaturesensormanufacturedintheexperimentaresmoothanditscontrastratioachieves25dBTheexperimentofthetemperat