石英晶體彎曲效應的研究及應用.pdf

1、大連理工大學碩士學位論文石英晶體彎曲效應的研究及應用姓名：王英光申請學位級別：碩士專業(yè)：機械制造及其自動化指導教師：孫寶元20030601百英晶體彎曲效應的研究及應用AbstractPiezoelectricmaterialshavebeenusedwidelyandtheireffectshavebeeninvestigatedindetailwiththedevelopmentofscienceandtechnologyhoweve

2、r，theresearchesofpiezoelectricbendingeffectonlystayonthelevelofexperimentsandmeasurementsConsideringthissituation，thispapertheoreticallyexplainstheexistenceofpiezoelectricbendingeffectanddesignsonekindofmonolithicmicrovi

3、brationactuatorbasedonthistheoryThisprojectissupportedbytheNationalNaturalScienceFoundationofChina(No69774020)andtheScientificResearchFoundationonDoctoralSubjectoftheMinistryofEducation(No98014106＆No20010141006)Fromtheap

4、plicationaspectofengineering，interdisciplinaryknowledgesuchasPhysicsofCrystals，PhyrsicsofDielectrics，TheoryofElasticityPiezoelectricityisutilizedintheinvestigationonthepiezoelectricbendingeffectofquartzcrystalTheinnerstr

5、essdistributionofquartzrodisinvestigatedfirstlybyusingthepurebendingtheoryofanisotropicbeam，andnumericalsolutionisapproachedTheinnerelectricpolarizationfieldisdeducedbyusingpiezoelectricequationConsideringtheequivalentpr

6、incipleofelectricfield，thedistributionofequivalentbodyandsurfaceboundchargesisalsodeducedTheexistenceofdirectpiezoelectricbendingeffectofquartzcrystalisverifiedbyboththeoryandexperimentBasedonamonolithicY00cutquartzcryst

7、albarthispaperdiscussestheconvemepiezoelectricbendingeffectanddeducesatheoreticallinearrelationshipbetweenthedeflectionatthetiDOfthebeamandthedrivingvoltageThispartofworkestablishestherelationshipbetweenelectricityandmec

8、hanicsThereforeitpresentsamethodoninvestigatingpiezoelectricbendingeffectOnthebaseofthemathematicalbendingeffectmodel，thispaperalsooptimizesthesinglerotatedcrystalcuts，anddesignsamonolithicmicroactuatorwhichcarlvibratein

9、bothXandYdirectionsusedinmicro’carving，consideringthefollowingfactors，suchassinglevibratingmode，piezoelectricactivityzerotemperaturecoefficientetcFinallythisthoughtisverifiedtobefeasiblebyaqualitativeexperimentTheaccomDl