偏振光直寫各向異性光柵的原理與實(shí)驗(yàn)研究.pdf

1、中國科學(xué)技術(shù)大學(xué)碩士學(xué)位論文偏振光直寫各向異性光柵的原理與實(shí)驗(yàn)研究姓名：段世媛申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：@指導(dǎo)教師：@2011055ABSTRACTDiffractiongratingisakindofopticalcomponentswhichisofwiderangeofapplicationsbothinresearchindustry.Diffractiongratingisakindofopticalcomponentswhic

2、hisofwiderangeofapplicationsbothinresearchindustry.Withthecontinuousimprovementondiffractiongratingperfmancerequirementsgratingmanufacturingtechnologyhasalsodevelopedrapidly.Themostpopularmethodsincluderulingmethodhologr

3、aphicmethoddirectwritingmethodpraymaskmethod.Basedonanalysisofprincipleofdiffractiongratingvarioustypesoflaserdirectwritingequipmentsthepolarizationdirectwritingsystemisproposed.Theequipmentnotonlyinheritstheadvantagesof

4、singlebeamrectangularcodinatelaserwritingequipmentsbutalsointroducespolarizationmodulationtechniquecircularsymmetrypolarizedlightgeneratingtechnique.Itcanbeusedftheprocessingofpolarizedlightsensitivematerialstofabricatea

5、nisotropygratings.Specificallybasedonthehardwareofthesystemtheexposureprocessisunderthecontrolofsoftware.Allcomponentswktogethertoachievetheproductionofanisotropicgratingsprecisiongraphic.Thisarticlediscussestheimplement

6、ationproductionprocessofdiffractiongratingprecisiongraphicswithpolarizedlightdirectwritingequipment.Thefirstmethodisaccdingtotherelationbetweendirectwritingdepth(height)exposure(includingopticalpowerexposuretime)wecontro

7、ltheexposureprocesspointbypointtofabricatesurfacereliefdiffractiongratings.Thesecondisaccdingtothecrespondencebetweentheazomolecularientationthelaserpolarizationstatewecontroltheelectroopticmodulatfdifferentpolarizedligh

8、ttoachievetheanisotropicdiffractiongratingswiththepointbypointphotolithographymethod.Thethirdisusingtheputgraphictoachievecombinedmodulationofpolarizationstateintensityoflasertoachievethegraphicsprocessing.Doubleazopolym

9、erwithsupramolecularstructureisofexcellentphotochemicalproperties.Ithashighbirefringenceshowheterogeneousstatesunderdifferentcombinationsofthepolarizationpropertiesintensityofdifferentlasersoitcanrecdstatesofthewritingbe